JPH0323303Y2 - - Google Patents
Info
- Publication number
- JPH0323303Y2 JPH0323303Y2 JP11587985U JP11587985U JPH0323303Y2 JP H0323303 Y2 JPH0323303 Y2 JP H0323303Y2 JP 11587985 U JP11587985 U JP 11587985U JP 11587985 U JP11587985 U JP 11587985U JP H0323303 Y2 JPH0323303 Y2 JP H0323303Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- microwave
- plasma generation
- plasma processing
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 17
- 230000032258 transport Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11587985U JPH0323303Y2 (en]) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11587985U JPH0323303Y2 (en]) | 1985-07-30 | 1985-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6224940U JPS6224940U (en]) | 1987-02-16 |
| JPH0323303Y2 true JPH0323303Y2 (en]) | 1991-05-21 |
Family
ID=30999947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11587985U Expired JPH0323303Y2 (en]) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323303Y2 (en]) |
-
1985
- 1985-07-30 JP JP11587985U patent/JPH0323303Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6224940U (en]) | 1987-02-16 |
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